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Nitride

Protective Properties of Silicon Nitride, Deposited by Bias ...

133 Protective Properties of Silicon Nitride, Deposited by Bias Reactive Sputtering Y. Lipin, and E. Machevski, J/S Co. Sidrabe, Latvia Key Words: Magnetron RF sputtering Silicon nitride Bias sputtering © 1999 Society of Vacuum Coaters 505/856-7188 42nd Annual Technical Conference Proceedings ...

Elevated-Temperature Mechanical Properties of Silicon Nitride ...

Elevated-Temperature Mechanical Properties of Silicon Nitride/Boron Nitride Fibrous Monolithic Ceramics RodneyW. Trice*,† and John W. Halloran* Materials Science and Engineering Department, University of Michigan, Ann Arbor, Michigan 48109-2136 A unique, all-ceramic material capable ...

Silicon Nitirde Deposition via PECVD

www.generalplasma.com 1 SILICON NITRIDE ARC THIN FILMS BY NEW PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SOURCE TECHNOLOGY M.A. George, H. Chandra, P. Morse, J. Morris, and J.E. Madocks General Plasma 543 East 25 th Street Tucson, Arizona 85713 ABSTRACT: Hydrogenated silicon nitride thin films ...

Chemical dry etching of silicon nitride and silicon dioxide ...

Chemical dry etching of silicon nitride and silicon dioxide using CF 4 /O 2 /N 2 gas mixtures B. E. E. Kastenmeier, a) P. J. Matsuo, J. J. Beulens, and G. S. Oehrlein b) Department of Physics, The University of Albany, State University of New York, 1400 Washington Avenue, Albany, New York 12222 ...

BORON NITRIDE

BORON NITRIDE - uNIQuElY vERSaTIlE One Material - Many Talents Boron nitride is both extremely heat resistant and virtually chemically inert, an electrical insulator and a good heat con-ductor.

AFM studyofforces between silica, silicon nitride and ...

ARTICLE IN PRESS YJCIS:12155 JID:YJCIS AID:12155/FLA [m5+; v1.59; Prn:4/05/2006; 10:37]P.1 (1-7) Journal of Colloid and Interface Science••• (••••) •••-••• www.elsevier.com/locate/jcis AFM studyofforces between silica, silicon nitride and polyurethane pads Igor Sokolov ...

Journal of Applied Physics

INTRODUCTION Amorphous silicon nitride (aSiN, :H) is extensively used in the microeIectronics industry for a wide variety of applications including use as an oxidation mask, a dopant diffusion barrier. the gate dielectric in field effect and thin film transistors, an encapsulant for III-V semiconductors ...

Silicon nitride ceramics - review of structure, processing ...

Occasional paper 44 Journal of Achievements in Materials and Manufacturing Engineering S. Hampshire Volume 24 Issue 1 September 2007 the objectives would not be achieved unless sintering without pressure could be achieved where shaping of components could be carried out by more conventional ...

Avoiding Aluminum Nitride Embrittlement in Steel Castings for ...

2 The Flow Control Division of Rockwell is concerned that low ductility steel castings, embrittled by aluminum nitride, may not be detected prior to their becoming valve components.

Syntheses and structure ofnanocrystalline gallium nitride ...

Syntheses and structure ofnanocrystalline gallium nitride obtained fromammonothermal method using lithium metal as mineralizator Y.C. Lan, X.L. Chen*, Y.P. Xu, Y.G. Cao, F. Huang Institute of Physics and Centre for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, P.R. China ...